JPS5757816B2 - - Google Patents

Info

Publication number
JPS5757816B2
JPS5757816B2 JP52109697A JP10969777A JPS5757816B2 JP S5757816 B2 JPS5757816 B2 JP S5757816B2 JP 52109697 A JP52109697 A JP 52109697A JP 10969777 A JP10969777 A JP 10969777A JP S5757816 B2 JPS5757816 B2 JP S5757816B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52109697A
Other languages
Japanese (ja)
Other versions
JPS5443458A (en
Inventor
Takao Namae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP10969777A priority Critical patent/JPS5443458A/ja
Publication of JPS5443458A publication Critical patent/JPS5443458A/ja
Publication of JPS5757816B2 publication Critical patent/JPS5757816B2/ja
Granted legal-status Critical Current

Links

JP10969777A 1977-09-12 1977-09-12 Automatic focusing device of electronic scan microscope Granted JPS5443458A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10969777A JPS5443458A (en) 1977-09-12 1977-09-12 Automatic focusing device of electronic scan microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10969777A JPS5443458A (en) 1977-09-12 1977-09-12 Automatic focusing device of electronic scan microscope

Publications (2)

Publication Number Publication Date
JPS5443458A JPS5443458A (en) 1979-04-06
JPS5757816B2 true JPS5757816B2 (en]) 1982-12-07

Family

ID=14516902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10969777A Granted JPS5443458A (en) 1977-09-12 1977-09-12 Automatic focusing device of electronic scan microscope

Country Status (1)

Country Link
JP (1) JPS5443458A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0316912U (en]) * 1989-06-30 1991-02-20

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57168459A (en) * 1981-04-10 1982-10-16 Hitachi Ltd Scanning electron microscope and similar device
GB2418061B (en) * 2004-09-03 2006-10-18 Zeiss Carl Smt Ltd Scanning particle beam instrument

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0316912U (en]) * 1989-06-30 1991-02-20

Also Published As

Publication number Publication date
JPS5443458A (en) 1979-04-06

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